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Large-scale PLD setup for special materials

Project type:

Industrial PLD system



    ● Dimensions: 997x965x771 mm;
    ● Development of a 1-KW PLD machine;
    ● Automated optomechanical system of synchronous target scanning with preservation of the radiation incidence angle;
    ● Substrate changing system driven by a vacuum motor;
    ● Positioning of the target node along two axes;
    ● Optical path with argon purge and interlock;
    ● Ultimate vacuum in the chamber is not worse than 10 -8 mbar.
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