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Large-scale PLD setup for special materials
Project type:
Industrial PLD system
Date:
2020
- ● Dimensions: 997x965x771 mm;
● Development of a 1-KW PLD machine;
● Automated optomechanical system of synchronous target scanning with preservation of the radiation incidence angle;
● Substrate changing system driven by a vacuum motor;
● Positioning of the target node along two axes;
● Optical path with argon purge and interlock;
● Ultimate vacuum in the chamber is not worse than 10 -8 mbar.
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