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Coherent PLD setup

Project type:

PLD system



    Features and main characteristics:
    ● Dimensions: 1100x461x434 mm;
    ● High-speed target milling spindle, up to 30,000 rpm;
    ● Automated optomechanical system of synchronous target scanning with preservation of the radiation incidence angle;
    ● Ultimate vacuum in the chamber not worse than 5*10 -8 mbar.
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