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1 kW fiber Pused Laser Deposition setup

Project type:

Industrial PLD system



    ● Dimensions: 1070x697x608 mm;
    ● Development of a 1-KW PLD machine;
    ● Mechatronic 2 axis positioning system for target node;
    ● Automatic control of the target position during its sputtering;
    ● Unique window protection system against dusting;
    ● Thermal shield to protect the target rotation spindle;
    ● Ultimate vacuum in the chamber is not worse than 10-6 mbar.
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