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Mini PLD system


The system was build for special materials deposition project by University team



Project type:

PLD system

    ● UHV up to 5*10-8 mbar;
    ● Eleptical reflector IR heater, sample temperature up to 800 C;
    ● Adjustable substrate-target distance;
    ● Chemical polished vacuum chamber;
    ● Adjustable door hinges;
    ● Simultaneous heating and sample rotation;
    ● Target holder for 4 positions;
    ● Sample pyrometer bracket.
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